Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
CMPP CMPP CMP slurry-filter cartridges
CMPPAzur System

FILTRATION / Depth Cartridges

CMP Depth Cartridges

Evaluate agglomerate control alongside useful abrasive retention, rather than selecting by nominal rating alone.

Product type
Depth Cartridges
Material options
PP / specialty nanofibre media
Specifications
Confirmed by model and process

Images and specifications refer to the indicated models. Contact us to confirm configuration and suitability.

Construction & operating principle

A CMP depth filter aims to retain unwanted agglomerates and oversized particles while preserving useful abrasive particles. Slurry is not simply dirty water: excessive filtration can alter solids content and particle distribution, affecting polishing. Available media can include PP or specialty nanofibre constructions. Evaluation therefore centres on formulation, particle stability, transport conditions and the process defects being controlled.

Typical uses

  • Agglomerate control after slurry preparation or transfer
  • Particle management in distribution and recirculation
  • Assessment of filtration before the point of use

PRODUCT SERIES

Product series & technical resources

Find a product series around your process requirements.

Explore model range ↗
CMPP CMPP CMP slurry-filter cartridges
CMPPAzur System
Azur SystemDepth Cartridges

CMPP

CMPP CMP slurry-filter cartridges

For control of oversized particles and agglomerates in CMP slurries, evaluated together with useful-abrasive retention and pressure rise.

Specifications & documents ↗
CMPN CMPN CMP slurry-filter cartridges
CMPNAzur System
Azur SystemDepth Cartridges

CMPN

CMPN CMP slurry-filter cartridges

For control of oversized particles and agglomerates in CMP slurries, evaluated together with useful-abrasive retention and pressure rise.

Specifications & documents ↗

Use & maintenance

  1. 01

    Startup

    Use slurry-appropriate filling and conditioning to limit air introduction or local concentration changes.

  2. 02

    Operation

    Track large-particle counts, solids and pressure together, considering pump shear and residence time.

  3. 03

    Assessment

    Combine particle distribution, chemical composition and polishing results instead of seeking the lowest particle count alone.

Product questions

Does a smaller rating always reduce defects?

It may remove useful abrasives or alter formulation, requiring polishing validation.

Can water tests predict slurry life?

Slurry loading and behaviour differ substantially; water data cannot replace actual-fluid trials.

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