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Keevalid VDKD / VDKR Keevalid CMP depth filters
Keevalid VDKD / VDKRCobetter

Image source:Cobetter · PDF pp. 42

PRODUCT SERIES / Cobetter

Keevalid VDKD / VDKR

Keevalid CMP depth filters

Graded PP micro- and nanofibre structures for large-particle control in CMP slurries, available with melt-blown or rolled media.

Series / Model
Keevalid VDKD / VDKR
Catalogue brand
Cobetter
Source pages
PDF 42, 43, 44

Keevalid VDKD / VDKR product image from the Cobetter semiconductor filtration catalogue.

01 / SPECIFICATIONS

Technical specifications

Filter mediumVDKD melt-blown PP; VDKR rolled PP
Support and hardwarePP
Seal materialTEV / EPDM
Maximum operating temperatureCartridge 80°C
Maximum operating pressureCartridge 0.3 MPa @ 21°C
ConfigurationsCartridge and multiple capsule formats

02 / FEATURES

Key features

  • UPW-rinsed; intended for evaluation with slurries such as STI, W and Cu.

03 / APPLICATIONS

Applications

CMP slurry filtration

Selection notes

  • Cartridge and capsule operating limits differ; verify the capsule connection and configuration.
  • The heading and body give different rating ranges; this summary does not combine them into a guaranteed range. Check the ordering tables on pages 43–44.
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