CMPP

CMPP CMP slurry-filter cartridges

For control of oversized particles and agglomerates in CMP slurries, evaluated together with useful-abrasive retention and pressure rise.

01 / SPECIFICATIONS

Filter medium	PP
Cage / core / end caps	PP
Lengths	5 / 10 / 20 / 30 in
Pore-size options	0.5 / 1 / 1.5 / 2 / 10 / 20 / 40 / 70 / 90 μm
Maximum operating temperature	80 °C
Maximum differential pressure	4 bar @ 20 °C; 2.4 bar @ 80 °C
End connections	DOE / 222 fin / 226 fin / 222 flat

02 / FEATURES

03 / APPLICATIONS

CMP polishing slurriesLiquids with high suspended-particle loadsColloidal and viscous fluids

Validate particle-size distribution, useful-abrasive loss and differential-pressure endpoint using the actual slurry.

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For control of oversized particles and agglomerates in CMP slurries, evaluated together with useful-abrasive retention and pressure rise.

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Thermally bonded fine polypropylene fibers form a graded depth structure for process-liquid particle prefiltration.