Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
CMPN CMPN CMP slurry-filter cartridges
CMPNAzur System

Image source:Azur System · Original supplied handbook page 77

PRODUCT SERIES / Azur System

CMPN

CMPN CMP slurry-filter cartridges

For control of oversized particles and agglomerates in CMP slurries, evaluated together with useful-abrasive retention and pressure rise.

Series / Model
CMPN
Catalogue brand
Azur System
Source pages
PDF 33

Series image reproduced from the supplied handbook; end connections and length depend on the selected configuration.

01 / SPECIFICATIONS

Technical specifications

Filter mediumPP
Cage / core / end capsPP
Lengths5 / 10 / 20 / 30 in
Pore-size options3 / 5 / 10 / 25 / 40 / 50 / 70 μm
Maximum operating temperature80 °C
Maximum differential pressure4 bar @ 20 °C; 2.4 bar @ 80 °C
End connectionsDOE / 222 fin / 226 fin / 222 flat

02 / FEATURES

Key features

  • Wound depth-filtration structure
  • PP construction without adhesives

03 / APPLICATIONS

Applications

CMP polishing slurriesLiquids with high suspended-particle loadsColloidal and viscous fluids

Selection notes

  • Validate particle-size distribution, useful-abrasive loss and differential-pressure endpoint using the actual slurry.
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