01 / SPECIFICATIONS
Technical specifications
| Carrier material | PFA |
|---|---|
| Wafer sizes | 2–12 in |
| Published material temperature range | −200 to 260 °C |
02 / FEATURES
Key features
- Carrier can be configured to requirements
- PFA material
03 / APPLICATIONS
Applications
Selection notes
- The temperature range is a material statement, not a loaded-cassette process rating; confirm operating conditions against the drawing.
