PFA cleaning basket

PFA wafer-cleaning baskets

PFA cleaning baskets for process handling of 4 in and 6 in silicon wafers.

01 / SPECIFICATIONS

Carrier material	PFA
Wafer sizes	4 / 6 in

02 / FEATURES

03 / APPLICATIONS

Silicon-wafer cleaning

The source lists material and wafer sizes only. Slot count, dimensions and process temperature require a specific drawing.

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