Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
UM-SLPF-V Semiconductor gas filters
UM-SLPF-VPurefilter

Image source:Purefilter · PDF pp. 8

PRODUCT SERIES / Purefilter

UM-SLPF-V

Semiconductor gas filters

PTFE membranes and fluoropolymer support with an electropolished 316L housing for semiconductor gas service.

Series / Model
UM-SLPF-V
Catalogue brand
Purefilter
Source pages
PDF 8

UM-SLPF-V — image from the original product catalogue

01 / SPECIFICATIONS

Technical specifications

Membrane / mediumPTFE
HousingElectropolished 316L
Support / drainageFluoropolymer
Design pressure5.2 MPa @ 140 °C
Maximum forward differential pressure0.7 MPa @ 20 °C
Maximum reverse differential pressure0.34 MPa @ 20 °C
Connections1/4 / 1/2 / 3/4 in VCR-type and compression options

02 / FEATURES

Key features

  • Electropolished 316L housing
  • VCR-type and compression options

03 / APPLICATIONS

Applications

Semiconductor process gases

Selection notes

  • The source states both “23 nm” and “0.003 μm”, which are not equivalent. No verified rating is published here.
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