Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
EXafPure WF All-fluoropolymer pleated cartridges
EXafPure WFMembrane Solutions

Image source:Membrane Solutions · PDF pp. 6

PRODUCT SERIES / Membrane Solutions

EXafPure WF

All-fluoropolymer pleated cartridges

PTFE membranes with PFA support and structural components for high-purity chemicals in semiconductor wet processing.

Series / Model
EXafPure WF
Catalogue brand
Membrane Solutions
Source pages
PDF 6

EXafPure WF — image from the original product catalogue

01 / SPECIFICATIONS

Technical specifications

Membrane / mediumPTFE
Support / drainagePFA
HousingPFA
SealsTEV / FFKM
Filtration ratings10 / 20 / 30 / 50 nm; 0.1 / 0.2 μm
Filtration areaΦ68: SX 0.91, SY 1.2 m² per 10 in; Φ83: MX 1.8, MY 2.2, MZ 2.8 m² per 10 in
Maximum forward differential pressure0.5 MPa @ 25 °C; 0.2 MPa @ 100 °C; 0.05 MPa @ 180 °C
Maximum reverse differential pressure0.35 MPa @ 25 °C
Maximum operating temperature180 °C
Metal cleanliness≤3 / ≤10 / ≤25 / ≤40 μg/device; electronic grade

02 / FEATURES

Key features

  • Multiple diameter and membrane-area configurations
  • Dry or ultrapure-water pre-wetted packaging

03 / APPLICATIONS

Applications

Wet etching and cleaningSC1 / SC2 / 49% HF / HNO₃ / EKC / NMP

Selection notes

  • The pressure/temperature table is explicitly for cartridge filters and is not extended to every integral configuration.
LET’S FIND THE RIGHT FIT

Let's talk about your next filtration challenge.

Discuss your application ↗
☎Contact↑

Find products, applications and resources