Image source：Cobetter · PDF pp. 34
PRODUCT SERIES / Cobetter
Filters for photoresist dispense pumps and systems, with membrane and size options for resist, coating liquids and solvents.
Photogile LIN product image from the Cobetter semiconductor filtration catalogue.
01 / SPECIFICATIONS
| Filter medium | PE / Nylon / PTFE / PI |
|---|---|
| Support and hardware | HDPE |
| Shell | HDPE |
| Seal material | FFKM / Kalrez |
| Maximum operating temperature | 30°C |
| Maximum operating pressure | 0.29 MPa @ 30°C |
| Filtration area | X-LINM 660 cm²; LINM PE/PTFE 1500, Nylon 1300 cm²; LINL PE/PI 3200, Nylon 2300 cm² |
02 / FEATURES
03 / APPLICATIONS
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