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IonGard SL MGS IonGard SL solvent purifiers
IonGard SL MGSCobetter

Image source:Cobetter · PDF pp. 65

PRODUCT SERIES / Cobetter

IonGard SL MGS

IonGard SL solvent purifiers

Modified PE ion-exchange media for metal-ion control in photoresists and high-purity solvents.

Series / Model
IonGard SL MGS
Catalogue brand
Cobetter
Source pages
PDF 65, 66

IonGard SL MGS product image from the Cobetter semiconductor filtration catalogue.

01 / SPECIFICATIONS

Technical specifications

Filter mediumModified PE
Support and hardwareHDPE
Maximum operating temperatureCartridge 60°C; SW44E capsule 38°C
Maximum operating pressure0.34 MPa @ 25°C
Filtration areaX1 0.5 m² per 10″; Z1 0.7 m² per 10″; SW44E 0.1 m²
Metal ion capacityAt >90% efficiency: X1 ≥50 meq; Z1 ≥80 meq; SW44E ≥10 meq
Seal materialTEV / FFKM (cartridge)

02 / FEATURES

Key features

    03 / APPLICATIONS

    Applications

    Photoresist, developers and photochemical solventsMetal ion control in process liquids

    Selection notes

    • Capacity is reported at the catalogue efficiency condition; validate capacity in the actual chemistry.
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