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Chemphobic CHT Chemphobic ultrapure chemical filters
Chemphobic CHTCobetter

Image source:Cobetter · PDF pp. 15

PRODUCT SERIES / Cobetter

Chemphobic CHT

Chemphobic ultrapure chemical filters

Hydrophobic PTFE media and PFA hardware in cartridge, disposable and small in-line formats for corrosive process chemicals.

Series / Model
Chemphobic CHT
Catalogue brand
Cobetter
Source pages
PDF 15, 16, 17

Chemphobic CHT product image from the Cobetter semiconductor filtration catalogue.

01 / SPECIFICATIONS

Technical specifications

Filter mediumHydrophobic PTFE
Support and hardwarePFA
Seal materialTEV / FFKM / TEE (cartridge)
Maximum operating temperatureCatalogue cartridge/disposable limit 180°C; Chemrapid is recommended above 120°C
Maximum operating pressureDisposable 0.58 MPa @ 25°C; 0.097 MPa @ 180°C
Maximum forward differential pressureCartridge 0.49 MPa @ 25°C
Maximum reverse differential pressureCartridge 0.39 MPa @ 25°C
Filtration areaX1 0.91; X2 1.21; Z1 1.3; Z2 2.2; Z3 3.0 m² per 10″

02 / FEATURES

Key features

    03 / APPLICATIONS

    Applications

    Semiconductor wet etch and clean

    Selection notes

    • Small in-line X/SX/EO/EX formats have separate limits; the 180°C limit does not apply to them.
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