Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
CFPR Pen-style photoresist capsules
CFPRDEEFINE

Image source:DEEFINE · PDF pp. 15

PRODUCT SERIES / DEEFINE

CFPR

Pen-style photoresist capsules

Disposable pen-style capsules for photoresist processing at small flow rates and in restricted spaces.

Series / Model
CFPR
Catalogue brand
DEEFINE
Source pages
PDF 15

CFPR — image from the original product catalogue

01 / SPECIFICATIONS

Technical specifications

Membrane / mediumPP / PTFE / NF
HousingPP / PVDF
Maximum operating temperature40 °C
Maximum differential pressure0.4 MPa @ 25 °C
Filtration ratings0.05 / 0.1 / 0.5 / 1 μm
Connections8 mm / 1/4 in Swagelok
Vent / drain connections1/8 in Swagelok

02 / FEATURES

Key features

  • Compact construction reduces hold-up
  • Multiple membrane and housing combinations

03 / APPLICATIONS

Applications

Photoresist and lithography materials

Selection notes

  • NF is available only with a PVDF housing.
  • Temperature and pressure limits are listed separately in the source; do not assume they can be reached simultaneously. Confirm the selected configuration against its controlled data sheet.
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