Image source：Cobetter · PDF pp. 39
PRODUCT SERIES / Cobetter
Modified PTFE media with PFA hardware and shell for negative-tone developer and aggressive organic solvents.
Photogile FERP product image from the Cobetter semiconductor filtration catalogue.
01 / SPECIFICATIONS
| Filter medium | Modified PTFE |
|---|---|
| Support and hardware | PFA |
| Shell | PFA |
| Seal material | FFKM / Kalrez |
| Listed removal ratings | 2 / 5 / 10 nm |
| Maximum operating pressure | SINM/OTTZ 0.39 MPa @ 25°C; LINM 0.29 MPa @ 25°C; PXOTT 0.29 MPa @ 23°C |
| Filtration area | SINM 1000; LINM 800; OTTZ 6000; PXOTT 2800 cm² |
02 / FEATURES
03 / APPLICATIONS
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