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Chemrapid CHR Chemrapid surface-modified PTFE filters
Chemrapid CHRCobetter

Image source:Cobetter · PDF pp. 18

PRODUCT SERIES / Cobetter

Chemrapid CHR

Chemrapid surface-modified PTFE filters

Surface-modified PTFE filters for aqueous process chemicals, with PFA hardware and a membrane designed to reduce dewetting.

Series / Model
Chemrapid CHR
Catalogue brand
Cobetter
Source pages
PDF 18, 19, 20

Chemrapid CHR product image from the Cobetter semiconductor filtration catalogue.

01 / SPECIFICATIONS

Technical specifications

Filter mediumModified PTFE
Support and hardwarePFA
Listed removal ratingsSemiconductor catalogue: 2 nm–0.5 μm
Maximum operating temperatureX1/X2/Z1/Z2/Z3 recommended below 120°C; disposable E4/E5 not above 180°C
Maximum operating pressureDisposable 0.58 MPa @ 25°C; 0.097 MPa @ 180°C
Maximum forward differential pressureCartridge 0.49 MPa @ 25°C
Maximum reverse differential pressureCartridge 0.39 MPa @ 25°C
Filtration areaX1 0.91; X2 1.21; Z1 1.3; Z2/E4 2.2; Z3/E5 3.0 m² per 10″

02 / FEATURES

Key features

  • Dry and UPW-prewet formats are listed.

03 / APPLICATIONS

Applications

Semiconductor wet etch and clean

Selection notes

  • The separate CHR datasheet, pages 2 and 5, uses different configuration names and ratings starting at 5 nm. This page follows the semiconductor catalogue; confirm the current controlled specification when ordering.
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