Azur System (Shanghai) Fluid Technology Co., Ltd.+86 139 1844 2892 / sales@auzrsystem.comFiltration · Separation · Purification
Chemega CHG Chemega PTFE filters
Chemega CHGCobetter

Image source:Cobetter · PDF pp. 23

PRODUCT SERIES / Cobetter

Chemega CHG

Chemega PTFE filters

PTFE media and PP hardware for lower-temperature dilute chemicals, solvents, DIW and developer solutions.

Series / Model
Chemega CHG
Catalogue brand
Cobetter
Source pages
PDF 23, 24

Chemega CHG product image from the Cobetter semiconductor filtration catalogue.

01 / SPECIFICATIONS

Technical specifications

Filter mediumHydrophobic / hydrophilic / modified PTFE
Support and hardwarePP
Seal materialTEV / EPDM (cartridge)
Maximum operating temperatureCartridge 90°C
Maximum forward differential pressureCartridge 0.4 MPa @ 25°C
Maximum reverse differential pressureCartridge 0.3 MPa @ 25°C
Filtration areaXP 0.85; X1 0.9; X2 1.2; Z1 1.3 m² per 10″

02 / FEATURES

Key features

  • The catalogue identifies XP for high-viscosity applications.

03 / APPLICATIONS

Applications

Semiconductor wet etch and cleanDeionized and ultrapure waterPhotoresist, developers and photochemical solvents

Selection notes

  • Cartridge and capsule operating limits differ; verify the capsule connection and configuration.
LET’S FIND THE RIGHT FIT

Let's talk about your next filtration challenge.

Discuss your application ↗
☎Contact↑

Find products, applications and resources